Loading System EFEM
Loading System EFEM
Loading system developed for 300mm wafers 【Features】 ○ In addition to operability, it can dock with various devices such as image measurement and automatic measuring machines. ○ By adopting the BBS (Building Block System), it allows for the addition of options according to the application, enabling an efficient system configuration that fits the budget. ● For other functions and details, please download the catalog.
- Company:ウイング
- Price:Other